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Photonic crystal fiber micro pressure sensor based on an extrinsic Fabry-Perot interferometer fabricated by femtosecond laser
2017
Proceedings of the 2017 7th International Conference on Manufacturing Science and Engineering (ICMSE 2017)
unpublished
Preserved Fulltext
A photonic crystal fiber extrinsic Fabry-Perot interferometric (FPI) micro pressure sensor is fabricated by femtosecond laser (fs) and fusion splicing. The pressure sensitivity can be adjusted by controlling the thickness of the diaphragm. The laser mircomachined FPI cavity helps to reduce the temperature-pressure cross-sensitivity. A pressure sensitivity of 282nm/MPa in terms of cavity length change is demonstrated within 1MPa.
doi:10.2991/icmse-17.2017.84
fatcat:wuh4w4awwzbzlmpiggn5mhxcgu