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Horn-coupled, commercially-fabricated aluminum lumped-element kinetic inductance detectors for millimeter wavelengths
2014
Review of Scientific Instruments
We discuss the design, fabrication, and testing of prototype horn-coupled, lumped-element kinetic inductance detectors (LEKIDs) designed for cosmic microwave background (CMB) studies. The LEKIDs are made from a thin aluminum film deposited on a silicon wafer and patterned using standard photolithographic techniques at STAR Cryoelectronics, a commercial device foundry. We fabricated twenty-element arrays, optimized for a spectral band centered on 150 GHz, to test the sensitivity and yield of the
doi:10.1063/1.4903855
pmid:25554282
fatcat:33boyfh22vgmjlsanjofblzesi