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The paper describes the principle of 0.2 THz stepped-frequency radar system which is utilized to achieve a onedimensional range profile and range resolution. Terahertz (THz) stepped frequency radar is more susceptible to the phase error which will cause the spread and shift of range profile, thus affecting the quality of the high resolution range profile and signal-to-noise ratio. Therefore, a method of phase compensation is proposed to improve the range resolution. After phase compensation,doi:10.7498/aps.63.148701 fatcat:ozvw5w6q7zgwxjdjkzvubdbmxe