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Miniaturization of terahertz systems is necessary for a broad-scale application of Terahertz technology. Waveguides are an important component in this regard. We present design and characterization of broadband planar dielectric waveguides made of highly resistive silicon having 200 x 50 µm2 cross-sectional area on a quartz substrate. The waveguides are characterized between 450 GHz and 1.1 THz. The waveguides show a lower cut-off frequency of ≈ 500 GHz and power transmission losses betweendoi:10.26083/tuprints-00017761 fatcat:2ik7w72berajzecn6o2zlixl2u