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Epitaxial manganite La0.67Sr0.33MnO3 (LSMO) layers, with a thickness of 20-50 nm, are prepared on single crystal (001) SrTiO3 (STO) substrates by pulsed laser deposition technique. Structural characterization (composition analysis, surface morphology), investigated by the Rutherford backscattering spectroscopy and atomic force microscopy, reveals the growth of stoichiometric LSMO films with a smooth surface (root-mean-square value of 0.21-1.6 nm). The prepared LSMO films possess high Curiedoi:10.12693/aphyspola.131.848 fatcat:ulecshsp35dbtgicjd7yxesf4q