This work presents a comparison of numerical simulation and experimental data for nanoindentation studies of nanostructural Me-carbonaceous films (where Me = Pd or Ni). Films containing palladium or nickel nanograins embedded in a carbonaceous matrix were synthesized by a PVD process. The topography of films was characterized by AFM and the mechanical properties were analyzed by nanoindentation. Nanoindentation experiments were performed with a tip made of diamond with a shape of a 90° cube

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... er three-sided pyramid in a Hysitron Triboscope. The finite element method (FEM) was used to simulate the indentation experiment in such heterogeneous material on nanoscale.