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FEM modelling of nanoindentation experiment for nanostructural Me-carbon film (Me = Pd, Ni)
Photonics Applications in Astronomy, Communications, Industry, and High-Energy Physics Experiments 2009
This work presents a comparison of numerical simulation and experimental data for nanoindentation studies of nanostructural Me-carbonaceous films (where Me = Pd or Ni). Films containing palladium or nickel nanograins embedded in a carbonaceous matrix were synthesized by a PVD process. The topography of films was characterized by AFM and the mechanical properties were analyzed by nanoindentation. Nanoindentation experiments were performed with a tip made of diamond with a shape of a 90° cubedoi:10.1117/12.837476 fatcat:xxceiqwwwjednjmuekjppdfgoe