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Maturation of the Vibration Environment in Advanced Technology Facilities
2005
Journal of the IEST
Semiconductor production and other advanced technology facilities are often designed in two stages, delineated as "base build" and "hook up". The first stage, at completion termed "as-built" by ISO, includes the design and construction of the shell structure and all architectural, mechanical, electrical, and process systems needed to operate the building. The second stage, hook up, includes the installation of the production tools and their local support equipment (dry pumps, piping
doi:10.17764/jiet.48.1.k3551g852v751t82
fatcat:hkcll6557jgelpnwvv5e34t4bm