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Properties of microplasmas excited by microwaves for VUV photon sources
2015
Plasma Sources Science & Technology
Microplasma sources typically take advantage of pd (pressure × size) scaling by increasing pressure to operate at dimensions as small as tens of microns. In many applications, low pressure operation is desirable, which makes miniaturization difficult. In this paper, the characteristics of low pressure microplasma sources excited by microwave power are discussed based on results from experimental and computational studies. The intended application is production of VUV radiation for chemical
doi:10.1088/0963-0252/24/6/065009
fatcat:jyxg4unffrgmrmh47sxs5fwf3m