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Microacoustic Sensors with Integrated Carbon Nanotubes for High Voc Sensitivity
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Electroacoustic resonators have proved to be appropriate candidates as VOC sensors owing to their high mass sensitivity. However, one of their drawbacks is their sensitivity to other external factors like the humidity. Here we propose an AIN-based solidly mounted resonator for VOC detection and humidity discrimination. This ability is achieved by defining different areas within the same device with different resonant characteristics by integrating carbon nanotubes (CNTs) in part of the exposeddoi:10.1109/transducers.2019.8808317 fatcat:ulqolvoby5aonby3pdmpwuxqgy