Microacoustic Sensors with Integrated Carbon Nanotubes for High Voc Sensitivity

Teona Mirea, Jimena Olivares, Marta Clement
2019 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)  
Electroacoustic resonators have proved to be appropriate candidates as VOC sensors owing to their high mass sensitivity. However, one of their drawbacks is their sensitivity to other external factors like the humidity. Here we propose an AIN-based solidly mounted resonator for VOC detection and humidity discrimination. This ability is achieved by defining different areas within the same device with different resonant characteristics by integrating carbon nanotubes (CNTs) in part of the exposed
more » ... urface while leaving the other bare. While CNTs act as sensing elements adsorbing VOC molecules, hence originating larger frequency shifts, the bare zone is affected only by the ambient humidity.
doi:10.1109/transducers.2019.8808317 fatcat:ulqolvoby5aonby3pdmpwuxqgy