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Li + ion conducting Li 3 PO 4 thin film electrolytes with thickness 300nm, 650nm and 1.2µm were deposited on Al 2 O 3 substrate at room temperature by thermal evaporation method. Reference and sensing electrodes were printed on Au interfaces by conventional screen printing technique. The overall dimension of the sensor was 3 x 3 mm and of electrodes were 1 x 1.5 mm each. The fabricated solid state potentiometric CO 2 sensors of type: CO have been investigated for CO 2 sensing properties. Thedoi:10.3390/s5110465 fatcat:cgu5issudzahjc6ycawucv6fhm