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Н.А. Соболев, А.Е. Калядин, К.В. Карабешкин, Р.Н. Кютт, В.М. Микушкин, Е.И. Шек, Е.В. Шерстнев, В.И. Вдовин. "Дефектная структура слоев GaAs, имплантированных ионами азота." Журнал технической физики 44.18 (2018) 24