B8.4 - Plasma Cleaning and Coating of Sensor Components

C.N. Dietel, AMA Association For Sensor Technology E.V., Sophie-Charlotten-Str. 15, 14059 Berlin, Germany
In today's sensor industry finding new environmentally friendly and efficient methods for surface treatment in order to achieve clean and functionalized surfaces has become absolutely essential. One of these methods has proven to be low pressure and atmospheric pressure plasma treatment. Unlike traditional chemical methods plasma treatment allows for immediate further processing of the samples so that the most effective use of the surface treatment can be made, leading to better bonding and
more » ... ter bonding and adhesion. During plasma treatment the surface is first of all cleaned of all organic contaminants, oil-residues and oxides and is then activated and polarized creating radical-sites which form a sturdy and lasting bond. Even very difficult oxide films can be removed with this plasma technology. Using this same technology these surfaces can also be nano-coated via plasma polymerization. This allows a functionalization of the surface to take place in order to achieve various different surface properties such as hydrophilicity, hydrophobicity, corrosion protection, isolating layers etc. Low pressure and atmospheric pressure plasma technology (Diener electronic Gmbh & Co KG) is already being used by many large and small companies around the world in R & D and in series manufacturing.
doi:10.5162/sensor2013/b8.4 fatcat:dtgbvsb5wrdt7pi4omoejxxxxa