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The geometry change of carbon nanofilaments by SF6incorporation in a thermal chemical vapor deposition system
Journal of the Korean Crystal Growth and Crystal Technology
Carbon nanofilaments (CNFs) could be synthesized on nickel catalyst layer-deposited silicon oxide substrate using C 2 H 2 and H 2 as source gases under thermal chemical vapor deposition system. By the incorporation of SF 6 as a cyclic modulation manner, the geometries of carbon coils-related materials, such as nano-sized coil and wave-like nanosized coil could be observed on the substrate. The characteristics (formation density and morphology) of as-grown CNFs with or without SF 6 incorporationdoi:10.6111/jkcgct.2011.21.3.119 fatcat:cqv3sh4kfjgshfyh5wulvh657y