Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures

Mélanie V. Kessels
2007 Journal of Micro/Nanolithography  
A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-m feature
more » ... zes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.
doi:10.1117/1.2767331 fatcat:7b7xgapx7fb6ve7is2uxrwbh2q