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Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation And Its Characterization
プラズマ酸化を援用した低ピット密度グラフェン/SiC構造の形成と評価

Makoto Ochi, Ouki Minami, Kohei Hosoo, Yasuhisa Sano, Kentaro Kawai, Kazuya Yamamura, Kenta Arima
2019 Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science  

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doi:10.14886/jvss.2019.0_1bp10 fatcat:elrcsnu3q5ekdj3nrlsfhbypgi
lang:ja
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Makoto Ochi, Ouki Minami, Kohei Hosoo, Yasuhisa Sano, Kentaro Kawai, Kazuya Yamamura, Kenta Arima. "Formation of Graphene with Low Pit Density on SiC Assisted by Plasma Oxidation And Its Characterization." Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2019.0 (2019) 1Bp10