UHV-Compatible Apparatus for the High-Density Plasma Induced by Surface Wave Modes
超高真空仕様表面波励起高密度プラズマ発生装置の評価

Tatsuya BANNO
2004 Shinku  
doi:10.3131/jvsj.47.281 fatcat:4v7eurkexjb53o6hskjnvfnp2y