Analysis the Performance of Controllers for He-Ne Laser Stabilization by Combination of Frequency Locking and Power Balanced Methods for Nano-Metrology Applications

Mahsa Bagheri, Saeed Olyaee, Erich Leitgeb
2014 MODARES JOURNAL OF ELECTRICAL ENGINEERING   unpublished
In this paper, analysis the performance of PI, PI-like fuzzy, and parallel fuzzy P+ fuzzy I controllers for He-Ne lasers frequency stabilization by combination of frequency locking and power balanced methods is presented. He-Ne lasers can be attributed to an unstable system due to the influence of environmental factors on its' frequency. Therefore, the stabilization of He-Ne laser is so important in sensitive applications such as laser interferometers and nanometrology systems. The simulation
more » ... sults of controllers by powerful software MATLAB/SIMULINK-GUI show that parallel fuzzy P+ fuzzy I controller has better stabilization performance and integrated absolute error (IAE) than others. Also, frequency fluctuations of He-Ne laser is about 2×10-11 by parallel fuzzy P+ fuzzy I controller.
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