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Afterglow dynamics of plasma potential in bipolar HIPIMS discharges
2021
Plasma Sources Science & Technology
In bipolar magnetron sputtering, the plasma afterglow is initiated by switching the target bias from a negative to positive voltage. In the following, the plasma potential evolution in this configuration is characterized, being responsible for the ion acceleration at the substrate sheath potential fall, in particular in high power impulse magnetron sputtering (HiPIMS). A mass-energy analyzer and a Langmuir probe respectively measure the ion energies and the plasma/floating potential at
doi:10.1088/1361-6595/ac2aed
fatcat:s7hvvlwxkba6ncyqlbe65lzfbu