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The effect of frequency on the lifetime of a surface micromachined microengine driving a load

D.M. Tanner, W.M. Miller, W.P. Eaton, L.W. Irwin, K.A. Peterson, M.T. Dugger, D.C. Senft, N.F. Smith, P. Tangyunyong, S.L. Miller
1998 1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98  

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Experiments have been performed on surface micromachined microengines driving load gears to determine the effect of the rotation frequency on median cycles to failure. We did observe a frequency dependence and have developed a model based on fundamental wear mechanisms and forces exhibited in resonant mechanical systems. Stressing loaded microengines caused observable wear in the rotating joints and in a few instances lead to fracture of the pin joint in the drive gear. Restoring Springs Combs
more » ... oving Shuttle X Y Pin Joint Figure 1. Sandia microengine with expanded views of the comb drive (top right) and the rotating gear (bottom left) shown in what we define as θ = 0.
doi:10.1109/relphy.1998.670438 fatcat:cz5vthsdfrfy5aen6jcjo2prgi
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D.M. Tanner, W.M. Miller, W.P. Eaton, L.W. Irwin, K.A. Peterson, M.T. Dugger, D.C. Senft, N.F. Smith, P. Tangyunyong, S.L. Miller. "The effect of frequency on the lifetime of a surface micromachined microengine driving a load." 1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98 (1998)