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Optical properties of thin films with plasmonic effect for light scattering
2012
Journal of Physics, Conference Series
Thin films of Al 2 O 3 with embedded Cu and Ag nanoparticles (NPs) are deposited by r.f. co-sputtering on glass substrates. The samples are annealed at 400 0 C and 500 0 C for 3 h in forming gas (N 2 +5% H 2 ) to stimulate Cu and Ag nanoclusters' formation. Multilayer structures (stacks) such as are deposited on glass substrate by consequently sputtering of the individual layers. Before deposition of the capping layers of Al 2 O 3 and ZnO:Al, the bi-layer structures are annealed in vacuum for
doi:10.1088/1742-6596/398/1/012017
fatcat:wvj3m5rbjrfc5ltiocbvcres6m