Optical properties of thin films with plasmonic effect for light scattering

K Lovchinov, O Angelov, D Dimova-Malinovska
2012 Journal of Physics, Conference Series  
Thin films of Al 2 O 3 with embedded Cu and Ag nanoparticles (NPs) are deposited by r.f. co-sputtering on glass substrates. The samples are annealed at 400 0 C and 500 0 C for 3 h in forming gas (N 2 +5% H 2 ) to stimulate Cu and Ag nanoclusters' formation. Multilayer structures (stacks) such as are deposited on glass substrate by consequently sputtering of the individual layers. Before deposition of the capping layers of Al 2 O 3 and ZnO:Al, the bi-layer structures are annealed in vacuum for
more » ... led in vacuum for 50 min at 220 0 C or 400 0 C in the case of glass/Al 2 O 3 /Ag, and at 220 0 C in the case of glass/ ZnO:Al/Ag and glass/ Ag/ZnO:Al/Ag. The diffuse and specular reflectance and transmittance spectra are measured in the spectral range of 300-1200 nm to study the plasma resonance of Cu and Ag nanoparticles. The optical properties of the films and the stack structures are discussed.
doi:10.1088/1742-6596/398/1/012017 fatcat:wvj3m5rbjrfc5ltiocbvcres6m