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Microvalve with ultra-low leakage
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
This paper reports a reduction of microvalve leakage based on precise measurements of leak and flow rates. The tight contact between a valve cap and seat, which is obtained by nanometer-scale flat surfaces and by self-alignment of the cap and seat-bore, makes the leakage from a microvalve ultra-low. The leak and flow rates are determined by precisely measuring pressure changes when introducing helium gas into a flow line. We have, consequently, attained a leak rate as low as 5.8 x 10-l' Pa.m3/s
doi:10.1109/memsys.1997.581844
fatcat:efunywiri5cclpnb25oqxxtc4e