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MEMS Deformable Mirrors for Adaptive Optics
1998
1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest
unpublished
This paper describes the development of continuous and segmented deformable mirrors fabricated using surface micromachining technology. Such mirrors have applications in adaptive optics imaging systems to correct phase aberrations in the optical path. Electrostatic actuators with 2 µm surface normal stroke provide controlled deformation to the mirror surface. Results of electromechanical characterization of several deformable mirrors are presented. Real time correction of optical aberrations is
doi:10.31438/trf.hh1998.16
fatcat:njcabmfxvrbktgylrwbytj7ada