MEMS Deformable Mirrors for Adaptive Optics

T. Bifano, R.K. Mali
1998 1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished
This paper describes the development of continuous and segmented deformable mirrors fabricated using surface micromachining technology. Such mirrors have applications in adaptive optics imaging systems to correct phase aberrations in the optical path. Electrostatic actuators with 2 µm surface normal stroke provide controlled deformation to the mirror surface. Results of electromechanical characterization of several deformable mirrors are presented. Real time correction of optical aberrations is
more » ... demonstrated using a single mirror segment with closed-loop feedback control.
doi:10.31438/trf.hh1998.16 fatcat:njcabmfxvrbktgylrwbytj7ada