Computer Modeling of the Transient RF Discharge in Nitrogen : A Continuum Model with the Energy Equation

Nobuyasu SATO, Tomonori KAMIBAYASHI, Hiroaki TAGASHIRA
C o mp u t e rMo . d e l i n g . o ft h eTr a n s i e n tR F D i s c h a r 豆 ei nNi t r o g e n A C o n t i n u u m Mo d e lwi t ht h eE n e r g yE q u a t i o n
doi:10.15113/00011760 fatcat:sxdyenb43fdpliidnb65pywdei