A scanning thermal microscopy system with a temperature dithering, servo-controlled interface circuit

Joohyung Lee, Y.B. Gianchandani
Proceedings of the 2003 International Symposium on Circuits and Systems, 2003. ISCAS '03.  
This paper describes a thermal imaging system which includes a customized micromachined thermal probe and circuit interface for a scanning microscopy instrument. The probe shank is made from polyimide for mechanical compliance and high thermal isolation, and has a thin-film metal tip of ≈50 nm in diameter. The circuit provides closed-loop control of the tip temperature and also permits it to be dithered, facilitating scanning microcalorimetry applications. This paper explains system design and
more » ... system design and optimization including both electrical and thermal analyses. Sample scans of patterned photoresist demonstrate noise-limited resolution of 29 pW/K in thermal conductance. Applications of the thermal imager extend from ULSI lithography research to biological diagnostics.
doi:10.1109/iscas.2003.1206334 dblp:conf/iscas/LeeG03 fatcat:kndxmvivdffe7ojngg44ucwgqy