Characteristics of IGZO Films Formed by Room Temperature with Thermal Annealing Temperature
상온에서 증착된 IGZO 박막의 열처리 온도에 따른 특성

Seok-Ryeol Lee, Kyong-Taik Lee, Jae-Yeal Kim, Myoung-Su Yang, In-Byeong Kang, Ho-Seong Lee
2014 Journal of the Korean institute of surface engineering  
We investigated the structural, electrical and optical characteristics of IGZO thin films deposited by a roomtemperature RF reactive magnetron sputtering. The thin films deposited were annealed for 2 hours at various temperatures of 300, 400, 500 and 600 o C and analyzed by using X-ray diffractometer, transmission electron microscopy, atomic force microscope and Hall effects measurement system. The films annealed at 600 o C were found to be crystallized and their surface roughness was decreased
more » ... hness was decreased from 0.73 nm to 0.67 nm. According to XPS measurements, concentration of oxygen vacancies were decreased at 600 o C. Optical band gap were increased to 3.31eV. The carrier concentration and Hall mobility were sharply increased at 600 o C. Our results indicate that the IGZO films deposited at a room temperature can show better thin film properties through a heat treatment.
doi:10.5695/jkise.2014.47.4.181 fatcat:6rwqwmnc7jhthac4uhmqi7ul3a