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Fabrication-process-induced variations of Nb/Al/AlOx/Nb Josephson junctions in superconductor integrated circuits
2010
Superconductors Science and Technology
Currently, superconductor digital integrated circuits fabricated at HYPRES, Inc. can operate at clock frequencies of ~ 40 GHz. The circuits present multilayered structures containing tens of thousands of Nb/Al/AlOx/Nb Josephson junctions (JJs) of various sizes interconnected by four Nb wiring layers, resistors, and other circuit elements. In order to be operational, the integrated circuits should be fabricated such that the critical currents of Josephson junctions remain within the tight design
doi:10.1088/0953-2048/23/3/034024
fatcat:phqsqoshbfcw3dzros3bbp3oxy