Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy

Seon Young Ryu, Hae Young Choi, Dong Uk Kim, Geon Hee Kim, Taehyun Kim, Hee Yeoun Kim, Ki Soo Chang
2015 JSTS Journal of Semiconductor Technology and Science  
Thermal characterization of individual pixels in microbolometer infrared image sensors is needed for optimal design and improved performance. In this work, we used thermoreflectance microscopy on uncooled microbolometer image sensors to investigate the thermal characteristics of individual pixels. Two types of microbolometer image sensors with a shared-anchor structure were fabricated and thermally characterized at various biases and vacuum levels by measuring the temperature distribution on
more » ... distribution on the surface of the microbolometers. The results show that thermoreflectance microscopy can be a useful thermal characterization tool for microbolometer image sensors. Index Terms-Microbolometer, infrared image sensor, thermoreflectance microscopy, thermal characterization Seon Young Ryu received the B.S. and M.S. degrees in physics from
doi:10.5573/jsts.2015.15.5.533 fatcat:fedascl3q5a2vl7atehtn7pw2m