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Thermal Characterization of Individual Pixels in Microbolometer Image Sensors by Thermoreflectance Microscopy
2015
JSTS Journal of Semiconductor Technology and Science
Thermal characterization of individual pixels in microbolometer infrared image sensors is needed for optimal design and improved performance. In this work, we used thermoreflectance microscopy on uncooled microbolometer image sensors to investigate the thermal characteristics of individual pixels. Two types of microbolometer image sensors with a shared-anchor structure were fabricated and thermally characterized at various biases and vacuum levels by measuring the temperature distribution on
doi:10.5573/jsts.2015.15.5.533
fatcat:fedascl3q5a2vl7atehtn7pw2m