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Correlation-based smoothing model for optical polishing
2013
Optics Express
A generalized model is developed to quantitatively describe the smoothing effects from different polishing tools used for optical surfaces. The smoothing effect naturally corrects mid-to-high spatial frequency errors that have features small compared to the size of the polishing lap. The original parametric smoothing model provided a convenient way to compare smoothing efficiency of different polishing tools for the case of sinusoidal surface irregularity, providing the ratio of surface
doi:10.1364/oe.21.028771
pmid:24514389
fatcat:m5suigx4xjezbihugqpxh64m3a