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The model developed here describes compressive stress evolution during the growth of continuous, polycrystalline films ͑i.e., beyond the point where individual islands have coalesced into a continuous film͒. These stresses are attributed to the insertion of excess adatoms at grain boundaries. Steady state occurs when the strain energy at the top of the film is balanced by the local excess chemical potential of surface adatmos. Strain gradients associated with this compressive stress mechanismdoi:10.1063/1.1575916 fatcat:xesmy7vwsnaqjcamygmu4cbbye