SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode

Y. Watanabe, T. Mitsui, T. Mineta, Y. Matsu, K. Okada
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  
This paper presents a 5-axis motion sensor which can detect 3-axis acceleration and 2-axis angular rate capacitively. This sensor is fabricated by SOI bulk-micromachining, and is vacuum sealed by anodic bonding and activation of the non-evaporated getters. By applying Z-axis reference vibration of a proof mass with an electrostatic force at resonant frequency, 5-axis motions can be detected capacitively at non-resonant detection mode. Measured sensitivity of X-, Y-and Z-axis acceleration were
more » ... proximately 1.9, 1.1 and 4.7 V/G, respectively. X-and Y-axis angular rate sensitivity were approximately 6.7 and 12 mV/(deg/s). The sensor chip size is 5.0×5.0×1.7mm 3 .
doi:10.1109/sensor.2005.1496466 fatcat:qsailed2ajbmboebhkzbxk4pxy