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SOI micromachined 5-axis motion sensor using resonant electrostatic drive and non-resonant capacitive detection mode
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
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This paper presents a 5-axis motion sensor which can detect 3-axis acceleration and 2-axis angular rate capacitively. This sensor is fabricated by SOI bulk-micromachining, and is vacuum sealed by anodic bonding and activation of the non-evaporated getters. By applying Z-axis reference vibration of a proof mass with an electrostatic force at resonant frequency, 5-axis motions can be detected capacitively at non-resonant detection mode. Measured sensitivity of X-, Y-and Z-axis acceleration were
doi:10.1109/sensor.2005.1496466
fatcat:qsailed2ajbmboebhkzbxk4pxy