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Nitride tunnel barriers have potential applications in magnetic tunnel junctions ͑MTJs͒. Thermal stability of the interfaces between Co-, Ni-, and Fe-based ferromagnets and these nitride tunnel barriers is critical to device performance. With guidance from low-temperature ternary isothermal phase diagrams of the Co-M -N, Ni-M -N, and Fe-M -N systems ͑M = Al, B, Nb, Ta, Ti, and V͒, the interfaces in Co/ MN, Ni/ MN, and Fe/ MN structures were evaluated in terms of two criterions: the phases indoi:10.1063/1.2040002 fatcat:xdtqgi6yyfhithij6n47uzcdlm