By measuring a reference material containing a known amount of the substance to be measured, the output of the analytical instrument can be associated with the value of the reference material. This report will outline characteristics that a reference material and a certified reference material should have, terms for expressing the reliability of measurement results, the uncertainty evaluation method, and the certified reference materials for surface analysis. Regarding the surface analysis

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... iques measuring the film thickness of a nanoscale-thin film layer and uses the film thickness as a measurand, the influence of material properties other than the film thickness will be mentioned. The challenges in developing standard materials for surface analysis will be described.