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Structured light for ultrafast laser micro- and nanoprocessing
2021
Optical Engineering: The Journal of SPIE
The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near-infrared down to the deep ultraviolet,
doi:10.1117/1.oe.60.2.025105
fatcat:gtsghuayjfg6blwsyh27tyscay