New deposition processes for the growth of oxide and nitride thin films [report]

E.A. Apen, L.M. Atagi, R.S. Barbero, B.F. Espinoza, K.M. Hubbard, K.V. Salazar, J.A. Samuels, D.C. Smith, D.M. Hoffman
1998 unpublished
doi:10.2172/676883 fatcat:ukszgcmk4bavpcetglbjr7vfru