A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch

J.H. Kim, H.K. Lee, B.I. Kim, J.W. Jeon, J.W. Yoon, E. Yoon
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE  
A high-fill factor micro-mirror for two-axis operation has been designed, analyzed, and fabricated by using electroplated copper and thick photoresist sacrificial mold. T he fabricated mirror has crossbar springs under the mirror plate for two-axis operation in order to achieve a high-fill factor. The maximum actuation angle before pull-in in the fabricated device has been measured as 2.65° at 244V. This shows good agreement with analysis and simulation results. The radius of curvature and RMS
more » ... curvature and RMS surface roughness of the mirror plate have been measured as 3.8cm and 12nm, respectively. 0-7803-7744-3/03/$17.00 ©2003 IEEE
doi:10.1109/memsys.2003.1189735 fatcat:5klaq4ow4fdb5ck5bu7hixqo6a