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Influence of ion-to-atom ratio on the microstructure of evaporated molybdenum thin films grown using low energy argon ions The authors demonstrate a simple method to fabricate ultrasmooth single-crystalline silver (Ag) films with high reflectivity and low plasmonic damping. The single-crystalline Ag thin film on the clean Si (100) substrate is first deposited by electron-gun evaporator and then treated by rapid thermal annealing (RTA) to improve its quality. The crystal structure and surfacedoi:10.1063/1.2769785 fatcat:o3immgxovva47cqd2puw4b7m5a