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We report imaging in the infrared with a microfabricated solid immersion lens. The integrated 15-m-diameter lens and cantilever are fabricated from single-crystal silicon and scanned in contact with a sample to obtain an image. We demonstrate a focused spot size of /5 and an effective numerical aperture of 2.5 with ϭ9.3 m light. The total power transmitted through the lens is a factor of 10 3 greater than through a metal aperture giving the same spatial resolution. Two 1.0 m holes in a metaldoi:10.1063/1.1313368 fatcat:hierqimsebcrjl6nvff4i3z4ou