Near-field infrared imaging with a microfabricated solid immersion lens

D. A. Fletcher, K. B. Crozier, C. F. Quate, G. S. Kino, K. E. Goodson, D. Simanovskii, D. V. Palanker
2000 Applied Physics Letters  
We report imaging in the infrared with a microfabricated solid immersion lens. The integrated 15-m-diameter lens and cantilever are fabricated from single-crystal silicon and scanned in contact with a sample to obtain an image. We demonstrate a focused spot size of /5 and an effective numerical aperture of 2.5 with ϭ9.3 m light. The total power transmitted through the lens is a factor of 10 3 greater than through a metal aperture giving the same spatial resolution. Two 1.0 m holes in a metal
more » ... m separated by 3.0 m are imaged with the solid immersion lens in transmission and shown to be resolved.
doi:10.1063/1.1313368 fatcat:hierqimsebcrjl6nvff4i3z4ou