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Fully integrated low phase-noise VCOs with on-chip MEMS inductors
2003
IEEE transactions on microwave theory and techniques
We present fully integrated high-performance voltage-controlled oscillators (VCOs) with on-chip microelectromechanical system (MEMS) inductors for the first time. MEMS inductors have been realized from the unique CMOS-compatible MEMS process that we have developed to provide suspended thick metal structures for high-quality ( ) factors. Fully integrated CMOS VCOs have been fabricated by monolithically integrating these MEMS inductors on the top of the CMOS active circuits realized by the TSMC
doi:10.1109/tmtt.2002.806510
fatcat:4ic7gjjkujantlah6kwdf4lzy4