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Research progress of normal-incidence optical system at extreme ultraviolet (EUV) wavelength

Zhe ZHANG, 同济大学 物理科学与工程学院 精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与 应用专业技术服务平台,上海 200092 Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai Frontiers Science Center of Digital Optics, Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China, Shengzhen YI, Qiushi HUANG, Shenghao CHEN, Wenbin LI, Zhong ZHANG, Zhanshan WANG
2022 Optics and Precision Engineering  

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Abstract:Extreme ultraviolet (EUV) normal-incidence optical systems are widely used in biological structure microscopic imaging, plasma diagnosis, solar physical observation, and EUV lithography. Therefore,these systems warrant further study. In this paper,the latest developments of the EUV nor• mal-incidence optical system at the Institute of Precision Optical Engineering(IPOE)of Tongji University are presented. Several normal-incidence optical systems used in different applications,such as
more » ... elec• trons diagnostics,micro-nano imaging,EUV radiation induced damage,and Z-pinch plasma diagnostics are listed. These systems have achieved excellent performance in their respective applications,achieving spatial resolutions of several microns at a millimeter scale field-of-view(FOV)and realizing ultrahigh spa•
doi:10.37188/ope.20223021.2678 fatcat:bse6rb42fnd6dkswjctgqr7qwy
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Zhe ZHANG, 同济大学 物理科学与工程学院 精密光学工程技术研究所,先进微结构材料教育部重点实验室,上海市数字光学前沿科学研究基地,上海市全光谱高性能光学薄膜器件与 应用专业技术服务平台,上海 200092 Institute of Precision Optical Engineering, MOE Key Laboratory of Advanced Micro-Structured Materials, Shanghai Frontiers Science Center of Digital Optics, Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China, Shengzhen YI, Qiushi HUANG, Shenghao CHEN, Wenbin LI, Zhong ZHANG, Zhanshan WANG. "Research progress of normal-incidence optical system at extreme ultraviolet (EUV) wavelength." Optics and Precision Engineering 30.21 (2022) 2678-2687