Novel Deep Glass Etched Microring Resonators Based on Silica-on-Silicon Technology

Haiyan Ou, Karsten Rottwitt, Hugh Philipp
2006 Integrated Photonics Research and Applications/Nanophotonics   unpublished
Microring resonators fabricated in silica-on-silicon technology using deep glass etching are demonstrated. The fabrication procedures are introduced and the transmission spectrum of a resonator is presented.
doi:10.1364/ipra.2006.imb4 fatcat:uzzyp7ziavc6rbkargg7cxarta