The driving force for developments in nano-technology results from the increasing demand related to key technologies like microelectronics and nano magnetic devices. In decreasing scale of many devices, high-resolution characterization methods have become of fundamental importance for further development in nano technologies. The availability of powerful microscopy methods, is certainly important for the development of new and functional materials. The characterization of materials at various

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... d increasing levels of resolution, structures, microstructure, and defect geometry, as well as chemical composition and spatial distribution are important parameters determining the behavior of materials and practical applications.