Flow Microsensor of Thermal Type for Measurements of Gas Fluxes

Oleg Sazhin
2012 Applied Mechanics and Materials  
An analytical model of the flow sensor of thermal type is developed. The results of the model application are used to develop a flow microsensor of thermal type with optimal functional characteristics. The technology of microsensor manufacturing is provided. The prototype of the microsensor suitable for use in the mass air flow meter is created. The basic characteristics of the microsensor are presented.
doi:10.4028/www.scientific.net/amm.249-250.118 fatcat:wi2psskbgjhnharweif5vtjx44