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A High-Sensitivity Fiber-Optic Fabry-Perot Gas Pressure Sensor With Epoxy Resin Adhesive
2022
IEEE Sensors Journal
A high-sensitivity fiber-optic gas pressure sensor based on a Fabry-Perot interferometer filled with epoxy resin adhesive is proposed. The factors of affecting the pressure sensitivity are theoretically analyzed and verified experimentally. In our experiment, the pressure sensitivity of the epoxy-filled sensor with the thinnest diaphragm thickness of 6.61 µm corresponding to the cavity length of 65.45 µm is −530.17 pm/kPa from 200 to 300 kPa. The sensitivity of the proposed pressure sensor with
doi:10.1109/jsen.2022.3168290
fatcat:22rcgebnnvbjjbw2idopokoyye