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Anisotropic Fe-N/Co-Zr-Nb Soft Magnetic Multilayer Films
Journal of the Magnetics Society of Japan
The purpose of this study is to obtain a soft magnetic film with high saturation flux density Bs and permeability !l and controllable uniaxial anisotropy. Making a multilayer structure using Fe-N for which Bs is close to that of pure Fe and Co-Zr-Nb, a soft magnetic film having Bs-19 kG,Hc:SO.3 Qe Hc and !li~3300 at 1 MHz was obtained. This film retains the soft magnetic properties up to 450C, and the ).l.i at 1 MHz annealed at 250C is greater than 4000. The uniaxial anisotropy field Hk in thedoi:10.3379/jmsjmag.18.s1_191 fatcat:nlmwjm3najac3esd2lytangl4e