A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is application/pdf.
S. Iida. "Latest Situation and Problems of Low-Temperature Plasma Processing Equipment for Semi-Conductor Materials." Sen i Kikai Gakkaishi (Journal of the Textile Machinery Society of Japan) 38.3 (1985) P151-P158