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Micro-fluid device using thick layer piezoactuator prepared on Si micromachined structure
Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164)
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The design and fabrication of a piezoelectric micro actuator on a silicon diaphragm is presented for application of micro ink jet. We developed the micro devices for the fluid transference that are fabricated using thick film technologies for ceramic materials and Si micro-machining. The performance of drop ejection was shown from the optimal design parameters. It is closely related to the precise machining of flow channel structure and piezoelectric actuator capacity. The features of micro fabrication and ink drop are described in this work.
doi:10.1109/robot.2001.932618
dblp:conf/icra/LeeCLL01
fatcat:6svhrddgubhbhbqojhips3a5hi