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502 Dynamic characteristics identification of a micro-cantilever by using the noncontact frequency response function measurements based on laser excitation
502 レーザー加振技術を用いた非接触周波数応答関数計測によるマイクロカンチレバーの動特性同定(G03-1動特性評価および最適化技術,G03機素潤滑部門)
2012
The Proceedings of Conference of Kanto Branch
502 レーザー加振技術を用いた非接触周波数応答関数計測によるマイクロカンチレバーの動特性同定(G03-1動特性評価および最適化技術,G03機素潤滑部門)
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