Three dimensional silicon photonic crystals fabricated by two photon phase mask lithography

D. Shir, E. C. Nelson, Y. C. Chen, A. Brzezinski, H. Liao, P. V. Braun, P. Wiltzius, K. H. A. Bogart, J. A. Rogers
2009 Applied Physics Letters  
We describe the fabrication of silicon three dimensional photonic crystals using polymer templates defined by a single step, two-photon exposure through a layer of photopolymer with relief molded on its surface. The resulting crystals exhibit high structural quality over large areas, displaying geometries consistent with calculation. Spectroscopic measurements of transmission and reflection through the silicon and polymer structures reveal excellent optical properties, approaching properties
more » ... ching properties predicted by simulations that assume ideal layouts.
doi:10.1063/1.3036955 fatcat:ytno56f6vbaenewdcnqtc6vn34