Nanogranular SnO₂ layers for gas sensing applications by in-situ deposition of nanoparticles produced by the Karlsruhe microwave plasma process

B. Schumacher, R. Ochs, H. Tröße, S. Schlabach, M. Bruns, D. V. Szabo, J. Haußelt
2007
doi:10.5445/ir/110068275 fatcat:743d6m3pmjbarnma5wryk5rtxa