Deposition of nanoscale LiPON films by high-frequency magnetron sputtering

I. V'yunov O., L. Kovalenko L., G. Belous A., O. Bohnke, C. Bohnke
2014 Zenodo  
The construction of laboratory installation for the fabrication of nanoscale amorphous films of lithium phosphorus oxynitride (LiPON) by high-frequency magnetron sputtering is described.
doi:10.5281/zenodo.3633923 fatcat:cjnadqdatfdzzcqlvta2x4c6fu